ISO 22493:2014 pdf free

ISO 22493:2014 pdf free.Microbeam analysis一Scanning electron microscopy一Vocabulary
special type of SE detector, dedicated to VPSEM or CPSEM, which operates on the principle of amplifiedion signal current generated in the SE-gas ionization process by the accelerated SEs in the presence of an electric field produced by positively biasing an electrode near the specimen placed in a gaseous environment
type of SE detector named after its designers T. Everhart and R.F.M. Thornley
Note 1 to entry: The basic component of the detector is a scintillator that emits photons when hit by high-energy electrons. The emitted photons are collected by a light guide and transported to a photomultiplier for detection.
dedicated BSE detector which operates on the principle of electron-hole production induced in a semiconductor by energetic electrons, with the features of flexible configuration, large solid angle,multiple arrays, energy selectivity and self-amplification
special kind of SE/BSE detector, adapted to the objective lens, in which the SEs/BSEs emitted from the specimen spiral up along the lens magnetic field, pass up through the lens bore and are collected by electron detector(s) placed on one side of the column
special kind of SE/ BSE detector, placed between the pole pieces of the objective lens, in which the SEs/BSEs emitted from the specimen spiral up along the lens magnetic field, pass up through the lens bore and are collected by electron detector(s) coaxial with the beam
angle between the surface of the specimen and the line connecting the beam impact point on the specimen surface to the centre of the detector face
operation of using the signal of intensity measured during the line scan to adjust the y deflection of the CRT to produce on the screen a curve displaying the distribution of intensity along the scan line loss of fidelity in a scanning image arising from defects in the scanning device or sometimes the scanning itself
formation of Moire fringes caused by the superposition of the periodicity of the specimen features and the grating of picture points forming the scanned image
action of forming an image by a mapping operation that collects information from the specimen space and passes the information to the display space
approach to SEM imaging in which the information collected from the specimen and the scanning control signal are treated and manipulated as continuous variables in the processing chain
approach to SEM imaging in which the information collected from the specimen and the scanning control signal are treated and manipulated as discrete variables, i.e. digitized in the processing chain, giving advantages over the analogue approach due to computer memory and data processing.ISO 22493 pdf download.