ISO 17861:2014 pdf free
ISO 17861:2014 pdf free.Fine ceramics (advanced ceramics, advanced technical ceramics)
Fine ceramics thin films sometimes possess a voided micro columnar structure, depending on film deposition conditions. If a fine ceramics thin film with a voided structure is exposed to a certain atmosphere with humidity, moisture in the atmosphere adsorbs on surfaces of the columns consisting the voided structures. The quantity of adsorbed water is affected by hydrostatic vapor pressure in the atmosphere. Depending on the quantity of water adsorbed, the refractive index of thin films changes,resulting in the change in transmittance and reflectance. To evaluate effects of water adsorption on to surface of voids of fine ceramics films on film optical properties, it is necessary to measure optical properties under a certain atmosphere, typically in an atmosphere with a high humidity. In addition to the measurements under a high humidity, for the sake of comparison, it is also necessary to measure the properties in vacuum, i.e. under the condition without water adsorption and low humidity. By comparing optical transmittance measured in vacuum, low humidity, and high humidity conditions, the stability of fine ceramics thin films shall be evaluated.
a) Spectrophotometer: Double beam method, wavelength accuracy±0,2 nm or less at UV-visible light and ±1,0 nm or less at near-infrared range, repeatability of wavelength setting ±0,1 nm or less at UV-visible light and±0,5 nm or less at near infrared range. For UV-visible and near-infrared range measurements, the range of 300 nm to approximately 2500 nm is desirable. The use of the integrating sphere for photometer is recommended. In the case of measurements in a range in infrared and far-infrared, the wavelength range can be expanded by using an appropriate spectrometer.
b) Environmental mini-chamber: An airtight container which could maintain the test sample in vacuum and low-and high-humidity environments for the measurements of the spectral of each environment. Build two windows with transparent quartz glass with the sample fixed inside the ;
chamber for the measurement of light transmittance. Also build an air inlet and exhaust ports, each with a valve. It is necessary to confirm that there is no vacuum leak from the chamber when all the valves are closed. In case of necessity, check the leak rate of the chamber by using a vacuum gauge.The spectrometry device configuration is shown in Figure 1. Example of the blueprint is shown in
Annex A.ISO 17861 pdf download.